Advanced Technology Facilities

Nanotechnology, semiconductor fabrication and imaging facilities require an ultra-low noise and ultra-low vibration environment, otherwise research accuracy or production yield suffers.  Some laboratories need even lower vibration environments to push commercial tools beyond their limits or develop a new instrument generation.  Noise and vibration can intrude from exterior vehicle or rail traffic, from internal occupants and research equipment, or from the large machinery and delivery systems required to support these facilities.  Given the high stakes, these are some of our most challenging projects, calling on the following skills:

 

  • Structural Dynamics: and finite element modeling for vibration of critical structures
  • Mechanical Systems: vibration and noise control design & specification
  • Tool Installation Support: and instrument foundation/pedestal design and testing
  • Acoustical Design: for human, lab animal, and instrument performance
  • Retrofit Design: to support new processes and update toolsets
  • Test and Measurement: site surveys, performance validation, benchmarking
  • Wireless Monitoring: of construction impact on existing facilities & surrounding community
  • Environmental Impact: planning and mitigation strategies for noise and vibration

 

Below are some of our projects addressing the needs of labs, fabs and advanced imaging sites.

Projects
Nanotech Vibration Design
Applied Materials Retrofit
Advanced Micro Devices
Center for Integrated Nanotech
Los Alamos National Labs
Material Deposition Tool
Inotera Memories Fab
Taoyuan, Taiwan
Collaborative Life Sciences Bldg
Oregon Health Sciences Univ
Molecular Engineering Bldg
Univ of Washington
Hynix – STMicroelectronics
Wuxi, Jiangsu, China
IBM Fabrication Facility
Samsung Austin Semiconductor
Toppoly Optoelectronics Fab
Chunan, Taiwan