Ultra Low-vibration Design for Lab, Semi Fab, Imaging

Nanotechnology, semiconductor fabrication and imaging facilities require an ultra-low noise and ultra-low vibration environment, otherwise research accuracy or production yield suffers.  Some laboratories need even lower vibration environments to push commercial tools beyond their limits or develop a new instrument generation.  Vibration can intrude from exterior vehicle or rail traffic, from internal occupants and research equipment, or from the large machinery and delivery systems required to support these facilities.  Given the high stakes, these are some of our most challenging projects, calling on the following skills:

 

  • Structural Dynamicsand finite element modeling for vibration of critical structures
  • Mechanical Systems vibration control design & specification
  • Tool Installation Supportand instrument foundation/pedestal design and testing
  • Retrofit Design to support new processes and update toolsets
  • Test and Measurementsite surveys, performance validation, benchmarking
  • Wireless Monitoringof construction impact on existing facilities & surrounding community
  • Environmental Impact planning and vibration mitigation strategies

 

Below are some of our projects addressing the ultra-low noise needs of labs, fabs and advanced imaging sites.

Projects
Nanotech Vibration Design
Center for Integrated Nanotech
Los Alamos National Labs
IBM Fabrication Facility
Applied Materials Retrofit
Benedum Hall Nanotech Labs
Univ of Pittsburgh
Molecular Engineering Bldg
Univ of Washington
Wafer Inspection Tool
Toppoly Optoelectronics Fab
Chunan, Taiwan
Research & Technology Bldg
Univ of Washington
Invitrogen / Molecular Probes
Pacific Northwest National Labs
US Army Medical Research Institute